Vorlesung/Übung
2 SemesterwochenstundenBTU-Vorlesungsverzeichnis ↗- Mittwoch14 Okt 2026 bis 20 Jan 202713:45 bis 15:15
Ausfälle und Änderungen
- 21.10.2026: keine Lehrveranstaltung
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13009Fakultät 1 – MINT – Mathematik, Informatik, Physik, Elektro- und Informationstechnik
Halbleitertechnologie
Titel auf Englisch: Semiconductor Technology
Lernergebnisse
After successfully completing the module, students have learned the fundamentals of semiconductor physics, the topology and functionality of key semiconductor devices and seminconductor munufacturing processes to realize integrated silicon-based circuits. They have gained an insight into the adjacent fields of material and device diagnostics, manufacturing process control and an overview of technological trends in the semiconductor industry. The knowledge gained from this course enables the students to evaluate given semiconductor technologies with regard to their suitability for apllication, e.g. in electronic circuits and systems.
Inhalte
- Historical overview of the development of semiconductor technology and semiconductor market
- Semiconductor physics basics
- Basics of integrated semiconductor devices (passives, diode, bipolartransistor, FET)
- Si crystal lattice, crystal growth, wafer production, doping and contamination of wafer material
- Oxidation
- Doping by diffusion and implantation
- Layer deposition and Epitaxial growth of crystalline Si(Ge) layers on the substrate
- Structuring by lithography, etching process
- Cleaning and planarization processes
- Silicon on insulator (SOI)
- Diagnostics, process control & Metrology for Si-based semiconductor processes
- Outlook on future semiconductor technologies
- Excursion to visit semiconductor FAB at IHP-Leibniz Institute for High Performance Microelectronics
Voraussetzungen
Verpflichtende Voraussetzungen
Keine
Empfohlene Voraussetzungen
- Knowledge of semiconductor physics based on the bachelor degree in physics, in particular knowledge of the content of module 11868: Allgemeine Physik IV (Festkörperphysik)
- Knowledge of the functioning and structure of electronic components, such as knowledge of the content of module 12364: Elektronische Bauelemente und Grundschaltungen
- Knowledge of solid-state physics or electrical engineering at a level corresponding to the first four semesters of a Bachelor's degree in physics or electrical engineering
Prüfungsmodalitäten
- Successful elaboration and presentation of Homework / Study, 10-15 min.
- Oral examination, 45 min. OR
- Written examination, 120 min. (for large numbers of participants)
Termine im WiSe 26/27
Prüfung
BTU-Vorlesungsverzeichnis ↗Angeboten in
- InformatikM.Sc.
Wahlpflichtkomplex: Maschinenbau/Elektrotechnik
- Micro- and NanoelectronicsM.Sc.
Wahlpflichtkomplex: Technology and Devices
- PhysicsM.Sc.
Wahlpflichtkomplex: Physical Specialization with Experimental Focus
Themengebiet: Nanophysics
| Studiengang | Abschluss | Wahlpflichtkomplex |
|---|---|---|
| Informatik | M.Sc. | Maschinenbau/Elektrotechnik |
| Micro- and Nanoelectronics | M.Sc. | Technology and Devices |
| Physics | M.Sc. | Physical Specialization with Experimental FocusThemengebiet: Nanophysics |
Literatur und Materialien
- S.M. Sze, „Physics of Semiconductor Devices“, John Wiley & Sons, 3 rd Edition, 2008
- R. Doering, Y. Nishi, “Handbook of Semiconductor Manufacturing Technology”, CRC Press, 2 nd Edition, 2008
- P.R. Gray, P.J. Hurst, S.H. Lewis, R.G. Meyer, „Analysis and Design of Analog Integrated Circuits“, John Whiley & Sons, 4 th Edition, 2001
- S. Dimirijev, „Understanding Semiconductor Devices“, Oxford University Press, 2 nd Edition
- J.D. Cressler, G. Niu, „Silicon-Germanium Heterojunction Bipolar Transistors“, Artech House, 2003
- D. A. Neamen, „Semiconductor Physics and Devices“, Mc Graw Hill, Fourth Edition, 2012
Bewertungen von Studierenden
Was Studierende über dieses Modul sagen. Die BTU hat damit nichts zu tun — hier schreiben nur Studierende, und jede Bewertung ist die Meinung einer einzelnen Person.