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13752Fakultät 1 – MINT – Mathematik, Informatik, Physik, Elektro- und Informationstechnik
Fortgeschrittene Mikrosystemtechnik, Schwerpunkt auf Mikrosensoren
Titel auf Englisch: Advanced Micro Systems, Focus on Microsensors
Lernergebnisse
After successful completion of the module, students have in-depth knowledge in the field of silicon-based microsystems technology, especially in the area of microsensor technology. They are able to analyze problems in this field and to develop solutions to problems, In addition, social competencies such as the ability to cooperate, as well as other individual competencies such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students.
Inhalte
- Differentiation of sensors, transducers, actuators
- Classification of sensors according to operating principles and intended use
- Characteristics of sensors such as linearity, hysteresis, resolution
- Analogue and digital sensors From elementary sensors to signal processing
- Design, mode of operation and properties of selected capacitive, optical, chemical, acoustic and ultrasonic sensors
- Application areas of sensors
- Signal conditioning
- Current research activities in microsensor technology
- Principles and examples of microactuators and microtransducers
Voraussetzungen
Verpflichtende Voraussetzungen
Keine
Empfohlene Voraussetzungen
- Sound knowledge of solid state physics at or beyond the bachelor level
- Knowledge of the topics of module 13019 Micro Systems
Prüfungsmodalitäten
- Successful seminar talk (with written part)
- Written exam, 90 minutes
Termine im WiSe 26/27
Die einzigen Termine im WiSe 26/27 sind Prüfungstermine – gelehrt wird das Modul in diesem Semester nicht.
Angeboten in
- Micro- and NanoelectronicsM.Sc.
Wahlpflichtkomplex: Technology and Devices
- PhysicsM.Sc.
Wahlpflichtkomplex: Physical Specialization with Experimental Focus
Themengebiet: Nanophysics - ElektrotechnikMaster
Wahlpflichtkomplex: Kein Komplex genannt
| Studiengang | Abschluss | Wahlpflichtkomplex |
|---|---|---|
| Micro- and Nanoelectronics | M.Sc. | Technology and Devices |
| Physics | M.Sc. | Physical Specialization with Experimental FocusThemengebiet: Nanophysics |
| Elektrotechnik | Master | Kein Komplex genannt |
Literatur und Materialien
- M. Madou, "Fundamentals of Microfabrication„, CRC Press , Boca Raton-NewYork (2002)
- Gianchandani, Yogesh B.; Tabata, Osamu; Zappe, Hans P.: „Comprehensive Microsystems“, Vol. 1-3, Elsevier, Amsterdam (2008)
Hinweise
- reworking of lecture
- literature work
- preparation of a talk
Bewertungen von Studierenden
Was Studierende über dieses Modul sagen. Die BTU hat damit nichts zu tun — hier schreiben nur Studierende, und jede Bewertung ist die Meinung einer einzelnen Person.